{"title":"Gas Abatement Systems","description":"\u003cp\u003eWe are the world leader in Exhaust Management Solutions. Our goals lie far beyond the destruction of toxic and global warming gases, which impact our environment.\u003c\/p\u003e\n\u003cp\u003eWe are application experts who understand our customers’ processes, and develop solutions focused on maintaining productivity and lowering risk. Serving all leading process tool OEMs, and with a presence at every major semiconductor fab in the world, our products are designed to meet the specific requirements of existing and developing processes.\u003c\/p\u003e\n\u003cp\u003eOur solutions will improve your process up-time, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of lower cost of ownership through reduced environmental emission and extended product lifetimes with a reduction in on-going service costs.\u003c\/p\u003e","products":[{"product_id":"grc-gas-reactor-column","title":"GRC- Gas reactor Column","description":"\u003ch3\u003eM150\u003c\/h3\u003e\n\u003cp\u003eThis system handles gas flows up to 60 slpm and destroys hazardous gases to below TLV (Threshold Limit Value) levels. The M150 requires no water supply and presents no duct corrosion issues associated with back-streaming of moisture. Reactive process by-products are chemically converted to harmless inorganic salts that are locked into the cartridge allowing for safe disposal.\u003c\/p\u003e\n\u003ch3\u003eM150I\u003c\/h3\u003e\n\u003cp\u003eThe M150i is an extension of the M150 Gas Reactor Column product range utilizing the field proven Hot Bed Reactor technology. The M150i provides safe, low-cost, point of use abatement for implanter process exhaust streams containing highly toxic PH3 and AsH3.\u003c\/p\u003e\n\u003cp\u003eThe M150i allows the currently best available technology for the abatement of PH3 and AsH3, the Edwards GRC, to be applied to implanter processes. Through the incorporation of an air blower, the M150i ensures that implanter tool exhaust lines are maintained at sub-atmospheric pressure in accordance with Semi S2 guidelines.\u003c\/p\u003e\n\u003ch3\u003eTechnologY\u003c\/h3\u003e\n\u003cp\u003eProven over a decade of use, Hot Bed Reaction offers the highest performance in removing hazardous gases from semiconductor process exhausts. Inline 250 is the latest development using this successful technology.\u003c\/p\u003e\n\u003cp\u003eThe patented mixture of inorganic granules is held in a stainless steel cartridge at an elevated temperature. Process gases immediately REACT with the granules in the column. The elevated temperature, and air supplied to the reaction zone via a tuyere, facilitate the reaction to stable salts. Reaction products are physically contained within the cartridge.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003eRecent SEMI S2 guidelines for implant processes state that exhaust lines should be kept at sub atmospheric pressure to minimise the risk of highly toxic precursor gases leaking into the Fab atmosphere. Tool manufacturers have therefore been driven to integrate safety interlocks into their tools that will shut down the tool if the pump exhaust pressure rises above -1.5 inches wg.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003eTo avoid unnecessary shut downs, and associated costly yield losses, exhaust management systems installed on implanter tools must generate minimal back pressure.\u003c\/p\u003e\n\u003cp\u003eThe M150i, developed to enable the best available abatement technology to be extended to implanter processes, uses an integrated air blower to maintain pump exhaust line pressure at less than -3.0 inches wg.\u003c\/p\u003e\n\u003ch3\u003eFeatures and Benefits\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eField proven hot bed reactor technology\u003c\/li\u003e\n\u003cli\u003eChemical reaction negates risk of desorption\u003c\/li\u003e\n\u003cli\u003eComplete containment of toxic substances\u003c\/li\u003e\n\u003cli\u003eIntegral air blower maintains exhaust line pressures at less than 3” wg\u003c\/li\u003e\n\u003cli\u003eLow Cost of Ownership\u003c\/li\u003e\n\u003cli\u003eSmall footprint\u003c\/li\u003e\n\u003cli\u003eCan be connected directly to the vacuum pump exhaust\u003c\/li\u003e\n\u003cli\u003eComplete chemical conversion of extremely toxic implanter process and by-product gases into stable salts\u003c\/li\u003e\n\u003cli\u003eAll implanter gases treated from AsH3 and PH3 to BF3\u003c\/li\u003e\n\u003cli\u003eInlet pipework can be maintained at 120ºC to reduce solids deposition\u003c\/li\u003e\n\u003cli\u003eNo risk of backstreaming moisture\u003c\/li\u003e\n\u003cli\u003eMinimum service connections required\u003c\/li\u003e\n\u003cli\u003eSimple, quick cartridge changeovers\u003c\/li\u003e\n\u003cli\u003eLow energy, low utility requirements\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57514072441214,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image_52.png?v=1780641468"},{"product_id":"atlas™","title":"Atlas™","description":"\u003ctable width=\"100%\" style=\"width: 100%;\"\u003e\n\u003ctbody\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 52.0211%;\"\u003e\n\u003ch2\u003eTechnical data\u003c\/h2\u003e\n\u003c\/td\u003e\n\u003ctd style=\"width: 47.6274%;\"\u003e\u003cbr\u003e\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 52.0211%;\"\u003eProcess gas inlets \/ Bypass outlet :\u003c\/td\u003e\n\u003ctd style=\"width: 47.6274%;\"\u003eNW40 stainless steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 52.0211%;\"\u003eAbatement system exhaust outlet :\u003c\/td\u003e\n\u003ctd style=\"width: 47.6274%;\"\u003e75 mm diameter polypropylene\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003ctr\u003e\n\u003ctd style=\"width: 52.0211%;\"\u003eCabinet extraction outlet :\u003c\/td\u003e\n\u003ctd style=\"width: 47.6274%;\"\u003e150 mm diameter x 150 mm deep, painted mild steel\u003c\/td\u003e\n\u003c\/tr\u003e\n\u003c\/tbody\u003e\n\u003c\/table\u003e\n\u003ch4\u003e\u003cbr\u003e\u003c\/h4\u003e\n\u003ch4\u003eAtlas TCS\u003cbr\u003e\n\u003c\/h4\u003e\n\u003ch3\u003eOverView\u003c\/h3\u003e\n\u003cp\u003eEffective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.\u003c\/p\u003e\n\u003cp\u003eThe Atlas TCS provides reliable, high performance, low cost abatement of flammable and acid gases from CVD exhausts. The Atlas TCS incorporates the unique inward-fired radiant combustor and high-efficiency multi-stage water scrubber developed for the Thermal Processing range and is ideally suited to the treatment of exhaust streams from CVD tools employing remote plasma NF3 cleans and high flows of F2.\u003c\/p\u003e\n\u003ch3\u003eFeatures and Benefits\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eHigh performance, robust abatement Capable of removing pyrophoric and acid gases to below TLV\u003c\/li\u003e\n\u003cli\u003eSafe treatment of up to 20 slpm fluorine\u003c\/li\u003e\n\u003cli\u003eExcellent powder handling capabilities\u003c\/li\u003e\n\u003cli\u003eLow cost of ownership\u003c\/li\u003e\n\u003cli\u003eWater recirculation for reduced water usage\u003c\/li\u003e\n\u003cli\u003eFull tool interfacing for utilities conservation\u003c\/li\u003e\n\u003cli\u003eOEM recommended\u003c\/li\u003e\n\u003cli\u003eMaximized tool uptime\u003c\/li\u003e\n\u003cli\u003eLow thermal mass facilitates rapid servicing\u003c\/li\u003e\n\u003cli\u003eField proven, corrosion-resistant design\u003c\/li\u003e\n\u003cli\u003eSmall footprint\u003c\/li\u003e\n\u003cli\u003eSupported by global field service organisation\u003c\/li\u003e\n\u003cli\u003eThird-party certification\u003c\/li\u003e\n\u003cli\u003eSEMI S2, F15 certified, ETL Listed\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch4\u003eAtlas TPU\u003c\/h4\u003e\n\u003ch3\u003eOverView\u003c\/h3\u003e\n\u003cp\u003eThe Atlas TPU is a world proven system and the semiconductor industry's standard abatement system for CVD. In one model, there is suitability for all CVD and Etch applications, enabling World Semiconductor Council PFC emission reduction targets to be met. Each inlet can be individually configured for the highest level of abatement of all PFC gases, Fluorine (F2) or Chlorine TriFluoride (ClF3).\u003c\/p\u003e\n\u003ch3\u003eFeatures and Benefits\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eLow Cost of Ownership\u003c\/li\u003e\n\u003cli\u003eWater Recirculation Unit (WRU) ensures low water usage\u003c\/li\u003e\n\u003cli\u003eUnrivalled Abatement Performance\u003c\/li\u003e\n\u003cli\u003eIndependently verified\u003c\/li\u003e\n\u003cli\u003eProvides high flow, high performance, CF4 abatement\u003c\/li\u003e\n\u003cli\u003eCapable of treating high flows of ClF3\u003c\/li\u003e\n\u003cli\u003eRobust Field Performance\u003c\/li\u003e\n\u003cli\u003eCertified to SEMI S2, CE Marked and ETL Listed\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch4\u003eAtlas Kronis\u003c\/h4\u003e\n\u003ch3\u003eOverView\u003c\/h3\u003e\n\u003cp\u003eEffective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003eAchieving clean combustion of low k organosilane precursors is challenging, and failure to do so results in unacceptable by-products and blockages in downstream systems. Ultimately such blockages can cause unscheduled downtime. Edwards has gained an in-depth understanding of low k CVD process issues by working extensively with OEMs and materials suppliers during process development.\u003c\/p\u003e\n\u003ch3\u003eFeatures and Benefits\u003cbr\u003e\n\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eHigh performance abatement\u003c\/li\u003e\n\u003cli\u003eDestroys all low k CVD precursors and clean species simultaneously\u003c\/li\u003e\n\u003cli\u003eComplete reaction eliminates clogging issues\u003c\/li\u003e\n\u003cli\u003eEnvironmental and health and safety compliance assured\u003c\/li\u003e\n\u003cli\u003eExtensive OEM qualification program\u003c\/li\u003e\n\u003cli\u003eLow cost of ownership\u003c\/li\u003e\n\u003cli\u003eControlled, cost-effective combustion\u003c\/li\u003e\n\u003cli\u003eOption to run on compressed dry air\u003c\/li\u003e\n\u003cli\u003eWater recirculation reduces water usage\u003c\/li\u003e\n\u003cli\u003eMaximised tool uptime\u003c\/li\u003e\n\u003cli\u003eExcellent handling of high powder volumes\u003c\/li\u003e\n\u003cli\u003eField-proven, corrosion-resistant design for chamber cleaning gases\u003c\/li\u003e\n\u003cli\u003eSupported by Edwards’ global service team for unrivalled field reliability\u003c\/li\u003e\n\u003cli\u003eEnhanced wafer security\u003c\/li\u003e\n\u003cli\u003ePLC Controlled, tool interfacing and full system monitoring\u003c\/li\u003e\n\u003cli\u003eThird-party certification\u003c\/li\u003e\n\u003cli\u003eSEMI S2, F15 certified, ETL listed\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch4\u003eAtlas Helios\u003c\/h4\u003e\n\u003ch3\u003eOverView\u003c\/h3\u003e\n\u003cp\u003eEffective exhaust management of CVD processes must be able to handle the deposition gases and the associated powders. The fluoride wastes from cleaning gases also require suitable treatment along with global warming gases. Abatement systems must be able to comply with these requirements in one complete unit.\u003c\/p\u003e\n\u003ch3\u003eFeatures and Benefits\u003cbr\u003e\n\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eProven high abatement performance for toxic, pyrophoric \u0026amp; corrosive gases\u003c\/li\u003e\n\u003cli\u003eReliable handling of associated powders\u003c\/li\u003e\n\u003cli\u003eControlled and complete oxidation of hydrogen to safe limits\u003c\/li\u003e\n\u003cli\u003eCapable of handling up to 200 lpm of hydrogen\u003c\/li\u003e\n\u003cli\u003eUp to 4 process inlets\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch4\u003eAtlas Etch\u003c\/h4\u003e\n\u003ch3\u003eOverView\u003c\/h3\u003e\n\u003cp\u003eAbatement solution for Generation 5, 6 and 7 Flat Panel Etch Processes\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eApplication challenges\u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eModern FPD (Flat Panel Display) Etch processes combine the use of large PFC gases flows (typically SF6 and\/or CF4) with large flows of Chlorine (Cl2) and Hydrochloric acid (HCl). A generation 6 etch process tool will typically combine 12slm of SF6 and\/or 8slm of CF4, with 15slm of Cl2 or 15slm HCl. Combustion abatement methods are faced with three challenges: the combustion of large PFC gas flows (PFCs are extremely stable chemical compounds), in the presence of large Cl2 flows (chlorine acts as a flame-suppressant), and the management of acidic by-products (HCl, HF, H2SO4 and SO2).\u003c\/p\u003e\n\u003cp\u003eAtlas Etch has successfully met with all three challenges. Optimisation of the combustion process and smart management of the gas input enable destruction and removal efficiencies (DREs) greater than 99% for SF6 and greater than 90% for CF4, even in the presence of Chlorine. The use of corrosion resistant materials in the design of the wet scrubbing stages ensures that Atlas Etch can remove acidic by-products reliably whilst maintaining low water consumption and high process uptime.\u003c\/p\u003e\n\u003ch3\u003eFeatures and Benefits\u003cbr\u003e\n\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eProven high abatement performance for toxic, pyrophoric \u0026amp; corrosive gases\u003c\/li\u003e\n\u003cli\u003eReliable handling of associated powders\u003c\/li\u003e\n\u003cli\u003eControlled and complete oxidation of hydrogen to safe limits\u003c\/li\u003e\n\u003cli\u003eCapable of handling up to 200 lpm of hydrogen\u003c\/li\u003e\n\u003cli\u003eUp to 4 process inlets\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57523665404286,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image_59.png?v=1780895466"},{"product_id":"spectra-series","title":"Spectra Series","description":"\u003ch2\u003eSPECTRA G\u003c\/h2\u003e\n\u003cp\u003eThe Spectra-G is a cost-effective, high performance exhaust treatment solution for nitride MOCVD manufacturing.\u003c\/p\u003e\n\u003ch3\u003eTechnology\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003e4 Stage Combustion \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe unique 4-stage combustion system of the Spectra-G ensures that oxidation of silane occurs in the middle of the combustion zone, away from the inlets, hence preventing the deposition of oxide powders on the combustor nozzles and maximizing uptime.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eEffective Powder Handling System \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe oxide powders generated by the combustion of metalorganics are entrapped in the cooling air stream that is introduced in the Spectra-G at a velocity of 10 m\/sec.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003eAir flow is generated by the house extraction system. This air-cooled design ensures that combustion by-products are efficiently transported from the Spectra-G to the factory central scrubber or dust filter.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eOptimum Combustion \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eNitride MOCVD processes involve the use of high H2 and NH3 flows. The Spectra-G utilizes the inherent flammability of these gases to minimize the additional fuel required to complete the gas abatement reactions (oxidation). Different fuel types are available to suit customer requirements.\u003cbr\u003e\u003c\/p\u003e\n\u003cp\u003eThe high gas capacity of the Spectra-G allows up to six production MOCVD tools to be connected. Each individual inlet allows each exhaust to act independently, thereby reducing capital and running costs.\u003c\/p\u003e\n\u003ch2\u003eSPECTRA Z\u003c\/h2\u003e\n\u003cp\u003eThe Spectra-Z system is a cost effective, reliable, high performance exhaust treatment solution for the latest generation Flat Panel Display (FPD) and Solar Cell manufacturing processes.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003e4 Stage Combustion \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe unique 4-stage combustion system of the Spectra-Z ensures that oxidation of silane occurs in the middle of the combustion zone, away from the inlets, hence preventing the deposition of silica powders on the combustor nozzles.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eEffective Powder Handling System \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eThe powders generated by the combustion of SiH4 and PH3 are entrapped in the cooling air stream that is introduced in the Spectra-Z at a velocity of 10 m\/sec. Air flow is generated by the house extraction system. This air-cooled design ensures that combustion by-products are efficiently transported from the Spectra-Z to the factory central scrubber or dust filter.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eBy-Product Destruction \u003c\/strong\u003e\u003c\/p\u003e\n\u003cp\u003eIn the Flat Panel CVD 8 solar cell process hydride gases SiH4, PH3, NH3) flow through the process chamber. The Spectra-Z abates these gases and related by products in a cost efficient manner by operating at an optimized fuel rate.\u003c\/p\u003e\n\u003cp\u003eFor 'clean' gas abatement, please contact your Edwards Exhaust Management Specialist.\u003c\/p\u003e\n\u003ch2\u003eUser Friendly System\u003c\/h2\u003e\n\u003cp\u003e\u003cstrong\u003eEase of use\u003c\/strong\u003e - The Spectra is configured, monitored and controlled via a large touch-screen display. Fourgauges display the fuel gas and extraction pressures.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eComponent Accessibility\u003c\/strong\u003e - Designed for fast maintenance - all electrical components are accessible from the front of the Spectra and all mechanical components are easily accessible from the left side of the system.\u003c\/p\u003e\n\u003cp\u003e\u003cstrong\u003eEasy communication\u003c\/strong\u003e - The PLC and built-in computer of the Spectra allow easy communication with the vacuum pumps, the process tool and the factory monitoring system.\u003c\/p\u003e\n\u003ch2\u003eFeatures and Benefits\u003c\/h2\u003e\n\u003cul\u003e\n\u003cli\u003eHigh Abatement Performance\u003c\/li\u003e\n\u003cli\u003eCapable of treating all exhaust gases from multiple MOCVD production tools\u003c\/li\u003e\n\u003cli\u003eProven Superior Reliability\u003c\/li\u003e\n\u003cli\u003eRisk Management\u003c\/li\u003e\n\u003cli\u003eCombustion of all flammable gases\u003c\/li\u003e\n\u003cli\u003eAir-cooled design as standard\u003c\/li\u003e\n\u003cli\u003eLow Cost of Ownership\u003c\/li\u003e\n\u003cli\u003eMinimum fuel gas consumption for full process gas abatement\u003c\/li\u003e\n\u003cli\u003eUp to six process inlets\u003c\/li\u003e\n\u003cli\u003eNo water or oxygen requirement\u003c\/li\u003e\n\u003cli\u003eLow power consumption\u003c\/li\u003e\n\u003cli\u003eLow nitrogen consumption\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57523692667262,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image_60.png?v=1780895979"}],"url":"https:\/\/vacpro.co.uk\/collections\/gas-abatement-systems.oembed","provider":"VACPRO - Vacuum Process Solutions","version":"1.0","type":"link"}