{"product_id":"reactive-gas","title":"Reactive Gas","description":"\u003ch4\u003eDissolved CO2\u003cbr\u003e\n\u003c\/h4\u003e\n\u003cp\u003eCompact Carbonated Ultrapure Water Delivery System\u003c\/p\u003e\n\u003cp\u003eThe DI-SOLVER CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and\/or corrosion by creating UPW (ultrapure water) with precisely defined conductivity. It is a compact system for tool integration, providing conductive DI-CO2 water (carbonated ultra-pure water) with closed loop controlled conductivity. The conductivity is kept at a constant value under changing flow conditions by control of the CO2 concentration in the DI-CO2 water..\u003c\/p\u003e\n\u003ch3\u003eFeatures\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eClosed-loop conductivity control\u003c\/li\u003e\n\u003cli\u003eSmall, compact module for integration\u003c\/li\u003e\n\u003cli\u003eLow cost of ownership, no CO2 and no UPW consumption at process pauses\u003c\/li\u003e\n\u003cli\u003eMaximum conductivity at physical limits\u003c\/li\u003e\n\u003cli\u003eHighest accuracy\u003c\/li\u003e\n\u003cli\u003eFlow is allowed to change between 0.5 - 90 L\/min to keep conductivity stable (up to ± 3%)\u003c\/li\u003e\n\u003cli\u003eMaintenance-free contactor\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch3\u003eApplications\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eSeveral process steps in the semiconductor industry require de-ionized (DI) water with precisely defined conductivity. The DI-SOLVER CO2 meets this demand.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/DI-SOLVER-DS.pdf?v=1620407492\" target=\"_blank\" rel=\"noopener\"\u003eDownload data sheet for more information\u003c\/a\u003e\u003c\/p\u003e\n\u003ch4\u003eOzone\u003cbr\u003e\n\u003c\/h4\u003e\n\u003cp\u003eMKS offers a complete spectrum of ultra clean, highly reliable ozone generation, delivery and accessory products. The ozone product family includes compact, high concentration ozone generators, closed-loop controlled ozone gas delivery subsystems, state-of-the-art, high concentration dissolved ozone liquid delivery subsystems and ozone accessories for flow mixing and ozone destruction.\u003c\/p\u003e\n\u003ch3\u003eCategories\u003c\/h3\u003e\n\u003cul\u003e\n\u003cli\u003eDissolved Ozone Delivery Systems\u003c\/li\u003e\n\u003cli\u003eOzone Gas Generators\u003c\/li\u003e\n\u003cli\u003eOzone Gas Delivery Systems\u003c\/li\u003e\n\u003cli\u003eOzone Sanitization\u003c\/li\u003e\n\u003cli\u003eAccessories for Ozone Products\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eVisit MKS site for more information of these products.\u003c\/p\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57548097945982,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image-2026-06-15T130651.750.png?v=1781509018","url":"https:\/\/vacpro.co.uk\/products\/reactive-gas","provider":"VACPRO - Vacuum Process Solutions","version":"1.0","type":"link"}