{"product_id":"remote-plasma-sources","title":"Remote Plasma Sources","description":"\u003ch4\u003eNF3 \u0026amp; Fluorine-based Gases\u003cbr\u003e\n\u003c\/h4\u003e\n\u003cp\u003ePlasma sources for NF3 and fluorine-based gases are a remote source for reactive gas to clean undesired deposits from interior walls of thin film deposition process chambers. By generating atomic fluorine that reacts with waste deposits in the chamber, new gases are formed that are readily scrubbed to minimize the environmental impact. In addition, the remote source reduces wear and tear on the process chamber as compared to in-situ RF methods.\u003c\/p\u003e\n\u003ch3\u003eProducts\u003c\/h3\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1632\" target=\"_blank\" rel=\"noopener\"\u003eParagon® AX7710MKS-01 Intelligent Remote Plasma Source (8 slm, NF3 flow)\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1366\" target=\"_blank\" rel=\"noopener\"\u003eASTRON® Paragon® AX7700 \u0026amp; AX7710 Reactive Gas Source Platform for New Process Applications (rated to 6.0 slm NF3 flow)\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=294\" target=\"_blank\" rel=\"noopener\"\u003eASTRON®ex AX7685 Remote Plasma Source (rated to 6.0 slm NF3 flow)\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=295\" target=\"_blank\" rel=\"noopener\"\u003eASTRON®hf-s (split) AX7645 Remote Plasma Source (rated to 15.0 slm NF3 flow)\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1236\" target=\"_blank\" rel=\"noopener\"\u003eASTRON®hf+ AX7635 Remote Plasma Source (rated to 22.0 slm NF3 flow)\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1379\" target=\"_blank\" rel=\"noopener\"\u003eASTRON® G7 AX7667 High Flow Remote Plasma Source (rated 20-30 SLM of NF3 \u0026amp; 20-30 Torr pressure)\u003c\/a\u003e\u003c\/p\u003e\n\u003cp\u003eVisit MKS site for more information of these products.\u003c\/p\u003e\n\u003ch4\u003eO2, N2, H2, H2O\u003cbr\u003e\n\u003c\/h4\u003e\n\u003cp\u003ePlasma is an ionized gas essential in many processes such as photo-resist removal, wafer pre-clean, and thin film nitridation and oxidation. MKS designs and develops RF and microwave powered remote and in-situ sources for generation of oxygen, nitrogen, hydrogen and water vapor plasmas.\u003c\/p\u003e\n\u003ch3\u003eProducts\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eRemote RF Plasma Sources\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1633\" target=\"_blank\" rel=\"noopener\"\u003eR*evolution® V AX7696MKS-01 Remote Plasma Source (10 slm Oxygen flow)\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=47\" target=\"_blank\" rel=\"noopener\"\u003eR*evolution® III AX7695 Remote RF Plasma Source\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1506\" target=\"_blank\" rel=\"noopener\"\u003eParagon® H* AX7780\/AX7785 Remote Plasma Gas Generators for Hydrogen-based Processes\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003eDownstream Plasma Sources\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1618\" target=\"_blank\" rel=\"noopener\"\u003eHigh Power Microwave Plasma Source\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1385\" target=\"_blank\" rel=\"noopener\"\u003eAX7610 Chemical Downstream Plasma Source\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eVisit MKS site for more information of these products.\u003c\/p\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57548066292094,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image-2026-06-15T125907.151.png?v=1781508553","url":"https:\/\/vacpro.co.uk\/products\/remote-plasma-sources","provider":"VACPRO - Vacuum Process Solutions","version":"1.0","type":"link"}