{"product_id":"rf-dc-power","title":"RF \u0026 DC Power","description":"\u003ch4\u003eDC Power Generators\u003cbr\u003e\n\u003c\/h4\u003e\n\u003cp\u003eDC Power Supplies and DC Power Generators\u003c\/p\u003e\n\u003cp\u003eMKS RPDG generators provide asymmetric bipolar and unipolar pulsed DC power for reactive PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) bias and enhancement coating applications. The RPDG line eliminates yield-limiting factors, thus enabling existing PVD tools to produce the high quality, low-defect films needed for next generation processes.\u003c\/p\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=318\" rel=\"noopener\" target=\"_blank\"\u003e\u003cstrong\u003eRPDG-50 5kW Pulsed DC Plasma Generator\u003c\/strong\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eAsymmetric bipolar and unipolar DC power in a single unit (3U)\u003c\/li\u003e\n\u003cli\u003eProgrammable frequency, and duty cycle.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=319\" rel=\"noopener\" target=\"_blank\"\u003e\u003cstrong\u003eRPDG-100 10kW Pulsed DC Plasma Generator\u003c\/strong\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eAsymmetric bipolar and unipolar DC power in a single unit (3U)\u003c\/li\u003e\n\u003cli\u003eProgrammable frequency, and duty cycle.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=800\" rel=\"noopener\" target=\"_blank\"\u003e\u003cstrong\u003eRPDG-200 20kW Pulsed DC Plasma Generator\u003c\/strong\u003e\u003c\/a\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003eAsymmetric bipolar and unipolar DC power\u003c\/li\u003e\n\u003cli\u003eProgrammable frequency, and duty cycle.\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003ch4\u003eRF Power Generators\u003cbr\u003e\n\u003c\/h4\u003e\n\u003cp\u003eRF Generator Products with Precise DSP-based Power Control\u003c\/p\u003e\n\u003cp\u003eMKS RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. MKS RF Generators, combined with our Impedance Matching Network and our V\/I Probe form a complete RF Delivery System.\u003c\/p\u003e\n\u003cp\u003eDynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.\u003c\/p\u003e\n\u003ch3\u003eProducts\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003e2MHz RF Plasma Generators\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=244\" rel=\"noopener\" target=\"_blank\"\u003eKEINOS™ 2MHz 5kW, 11kW \u0026amp; 13kW RF Plasma Generators\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=304\" rel=\"noopener\" target=\"_blank\"\u003eNOVA® 2 MHz 2.5kW \u0026amp; 5.0kW RF Plasma Generators\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003e\u003cstrong\u003e13.56MHz RF Plasma Generators\u003c\/strong\u003e\u003c\/p\u003e\n\u003cul\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1173\" rel=\"noopener\" target=\"_blank\"\u003eGHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW, High-Reliability RF Plasma Generators\u003c\/a\u003e\u003c\/li\u003e\n\u003cli\u003e\u003ca href=\"https:\/\/www.mks.com\/product\/Product.aspx?ProductID=1347\" rel=\"noopener\" target=\"_blank\"\u003eelite™ Series 750, 600, \u0026amp; 300 Watt, 13.56 MHz, RF Plasma Generators\u003c\/a\u003e\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cp\u003eVisit MKS site for more information of these products.\u003c\/p\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57548019007870,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image-2026-06-15T114935.749.png?v=1781504383","url":"https:\/\/vacpro.co.uk\/products\/rf-dc-power","provider":"VACPRO - Vacuum Process Solutions","version":"1.0","type":"link"}