{"product_id":"vapor-delivery-controllers","title":"Vapor Delivery Controllers","description":"\u003ch3\u003eProducts\u003c\/h3\u003e\n\u003ch3\u003e1150C Heated Pressure-Based Mass Flow Controller\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eSonic Flow\u003c\/strong\u003e for High Temperature Operation up to 150 degrees C\u003c\/p\u003e\n\u003cp\u003eThe 1150C Heated Pressure-Based Mass Flow Controller using viscous flow through a choked orifice is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.\u003c\/p\u003e\n\u003cp\u003eThe 1150C consists of a fixed flow element and one capacitance manometer for flow measurement, with a proportioning solenoid control valve for flow control (U.S. Patent No. 4,679,585). The 1150C is contained within a compact temperature-controlled assembly with a temperature status LED and relay to indicate when temperature is in range.\u003c\/p\u003e\n\u003cp\u003eThe 1150C Heated Pressure-Based Mass Flow Controller using viscous flow through a choked orifice is capable of delivering vaporized liquid source materials such as: TEOS, DADBS, HMDS, TMCTS, TEAL, TEB, TEG, TEI, TMAL, TMB, TMG, TMI, TaCl5, DMEAA, Ti[OCH(CH3)2]4, TiCl4, TIBAL, and TMP.\u003c\/p\u003e\n\u003ch3\u003e1152C Heated Pressure-Based Mass Flow Controller\u003c\/h3\u003e\n\u003cp\u003e\u003cstrong\u003eLaminar Flow\u003c\/strong\u003e for High Temperature Operation up to 150 degrees C\u003c\/p\u003e\n\u003cp\u003eThe MKS Instruments 1152C Vapor Source MFC is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.\u003c\/p\u003e\n\u003cp\u003eThe 1152C consists of a fixed flow element and two capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control (U.S. Patent No. 4,679,585). The 1152C contained within a compact temperature-controlled assembly with a temperature status LED and relay to indicate when temperature is in range.\u003c\/p\u003e\n\u003cp\u003eThe 1152C Heated Pressure-Based Mass Flow Controller using viscous flow through a laminar flow tube is capable of delivering vaporized liquid source materials such as: TEOS, DADBS, HMDS, TMCTS, TEAL, TEB, TEG, TEI, TMAL, TMB, TMG, TMI, TaCl5, DMEAA, Ti[OCH(CH3)2]4, TiCl4, TIBAL, and TMP.\u003c\/p\u003e","brand":"VACPRO - Vacuum Process Solutions","offers":[{"title":"Default Title","offer_id":57548011635070,"sku":null,"price":0.0,"currency_code":"GBP","in_stock":false}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0120\/5321\/7338\/files\/image-2026-06-15T114708.223.png?v=1781504234","url":"https:\/\/vacpro.co.uk\/products\/vapor-delivery-controllers","provider":"VACPRO - Vacuum Process Solutions","version":"1.0","type":"link"}