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We are the world leader in Exhaust Management Solutions. Our goals lie far beyond the destruction of toxic and global warming gases, which impact our environment.
We are application experts who understand our customers’ processes, and develop solutions focused on maintaining productivity and lowering risk. Serving all leading process tool OEMs, and with a presence at every major semiconductor fab in the world, our products are designed to meet the specific requirements of existing and developing processes.
Our solutions will improve your process up-time, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of lower cost of ownership through reduced environmental emission and extended product lifetimes with a reduction in on-going service costs.
Peak pumping speed
Ultimate Vacuum
Ultimate vacuum with gas ballast
Water vapour handling capacity
Noise Leve
Units
m3/h
mbar
mbar
g/h
dB(A)
nXDS6i
6.2
0.02
0.05
110
52
nXDS10i
11.4
0.007
0.04
145
52
nXDS15i
15.1
0.007
0.04
145
52
nXDS20i
22.0
0.03
0.06
220
52
XDS35i
35
0.01
0.02
240
57
R&D > Primary Vacuum Pumps > Large Dry
Edwards has the largest installed base of dry vacuum pumps in the world. Dry mechanism vacuum pumps offer many key advantages for industrial applications. Edwards GV80 Drystar is robust, highly reliable and the most cost-effective introduction to basic dry pumping. Edwards' intelligent and compact dry pumps (iXL - for clean applications; GX - for medium applications; and iXH - for harsh applications) will save energy, reduce installation costs, and enhance process control and optimisation.
