Welcome to the new VACPRO website:

“Optimising your vacuum process”

Gas Abatement Systems

We are the world leader in Exhaust Management Solutions. Our goals lie far beyond the destruction of toxic and global warming gases, which impact our environment.

We are application experts who understand our customers’ processes, and develop solutions focused on maintaining productivity and lowering risk. Serving all leading process tool OEMs, and with a presence at every major semiconductor fab in the world, our products are designed to meet the specific requirements of existing and developing processes.

Our solutions will improve your process up-time, yield, throughput and safety compliance whilst striving to balance the often conflicting requirements of lower cost of ownership through reduced environmental emission and extended product lifetimes with a reduction in on-going service costs.

iGX

105-800 m³/h

0.0007 mbar

Peak pumping speed

Ultimate Vacuum

Ultimate vacuum with gas ballast

Water vapour handling capacity

Noise Leve

Units

m3/h

mbar

mbar

g/h

dB(A)

nXDS6i

6.2

0.02

0.05

110

52

nXDS10i

11.4

0.007

0.04

145

52

nXDS15i

15.1

0.007

0.04

145

52

nXDS20i

22.0

0.03

0.06

220

52

XDS35i

35

0.01

0.02

240

57

R&D > Primary Vacuum Pumps > Large Dry

Edwards has the largest installed base of dry vacuum pumps in the world. Dry mechanism vacuum pumps offer many key advantages for industrial applications. Edwards GV80 Drystar is robust, highly reliable and the most cost-effective introduction to basic dry pumping. Edwards' intelligent and compact dry pumps (iXL - for clean applications; GX - for medium applications; and iXH - for harsh applications) will save energy, reduce installation costs, and enhance process control and optimisation.

80-390 m3/h

0.003 mbar

GX

90-1000 m3/h

0.005 mbar

iXL

110-930 m3/h

0.001 mbar

iXH

100-1025 m3/h

0.005 mbar