We offer a range of low-cost, point of use dry abatement systems for semiconductor processing. Each system uses the unique hot bed reactor technology developed for the GRC (Gas Reactor Column) range.
The M150 Single GRC is a compact dry gas treatment system for removing hazardous etch and CVD emissions at the source, converting them into harmless solids within an easily changed and disposable cartridge.
This system handles gas flows up to 60 slpm and destroys hazardous gases to below TLV (Threshold Limit Value) levels. The M150 requires no water supply and presents no duct corrosion issues associated with back-streaming of moisture. Reactive process by-products are chemically converted to harmless inorganic salts that are locked into the cartridge allowing for safe disposal.
The M150i is an extension of the M150 Gas Reactor Column product range utilizing the field proven Hot Bed Reactor technology. The M150i provides safe, low-cost, point of use abatement for implanter process exhaust streams containing highly toxic PH3 and AsH3.
The M150i allows the currently best available technology for the abatement of PH3 and AsH3, the Edwards GRC, to be applied to implanter processes. Through the incorporation of an air blower, the M150i ensures that implanter tool exhaust lines are maintained at sub-atmospheric pressure in accordance with Semi S2 guidelines.
Proven over a decade of use, Hot Bed Reaction offers the highest performance in removing hazardous gases from semiconductor process exhausts. Inline 250 is the latest development using this successful technology.
The patented mixture of inorganic granules is held in a stainless steel cartridge at an elevated temperature. Process gases immediately REACT with the granules in the column. The elevated temperature, and air supplied to the reaction zone via a tuyere, facilitate the reaction to stable salts. Reaction products are physically contained within the cartridge.
Recent SEMI S2 guidelines for implant processes state that exhaust lines should be kept at sub atmospheric pressure to minimise the risk of highly toxic precursor gases leaking into the Fab atmosphere. Tool manufacturers have therefore been driven to integrate safety interlocks into their tools that will shut down the tool if the pump exhaust pressure rises above -1.5 inches wg.
To avoid unnecessary shut downs, and associated costly yield losses, exhaust management systems installed on implanter tools must generate minimal back pressure.
The M150i, developed to enable the best available abatement technology to be extended to implanter processes, uses an integrated air blower to maintain pump exhaust line pressure at less than -3.0 inches wg.