Isolation Valves

MKS is a leader in high reliability vacuum isolation valves. The MKS family of vacuum isolation valves includes bellows sealed valves, ball valves, soft start dual-stage valves, and safety shut off valves. These are available in a wide array of configurations including manual, pneumatic, and electromagnetic actuators.

Products

LoPro™, Low-Profile

LoPro™ Aluminum Body, Low-Profile
LoPro™ Two-Stage, Low-profile, "soft-start"
Cv™, Compact
CRV, Corrosion & Ozone Resistant
High Cycle Valves (HCV), 10 Million Cycle Life
ECv, Electromagnetic Compact
Ball Valves, For Vacuum Use
Ultra-high Vacuum (UHV), Metal-Sealed to Atmosphere
Jalapeño Series, Heated Valves
Heated Ball Valves, For Vacuum Use
Jalapeño LoPro™, Low-Profile Heated Valves
150/160 & V-100 Series, Standard Single Stage
Two-Stage Series, Standard, "soft-start"
IDA™, In-situ Diagnostics Access
High Flow Valves (HFV), High Conductance, Large Port
Integrated LoPro™, Low-Profile, Integrated "soft-start"
Series 225 AUTO-SOFT, Automatic Soft Starts
Rapid Isolation Valve, System Protection
145 VACUUM SENTRY®, System Protection from Pump Failure

Visit MKS site for more information of these products.