Welcome to the new VACPRO website:

“Optimising your vacuum process”

ixh Dry Pump

Edwards  IXH Dry Vacuum Pump

The iXH dry pump range is an evolution of our market leading iH, and sets new standards for harsh process capability, reliability and lower cost of ownership. iXH pumps offer greatly increased dust and powder handling capabilities.

100 - 6.000 m³/h

Modular design with a wide range of pump sizes

More process capability

Greatly increased powder handling capability
and innovative Gas Buster™ technology

'Plug and Pump'

Integral controller and safety systems for flexible operation. Low installation costs.

No routine maintenance

No preventive maintenance between major overhauls

iXH sizes

Peak pumping speed

Ultimate pressure

Power at ultimate

Power in Green Mode

Noise at ultimate

m³/h

mbar

kW

kW

dB(A)

Edwards  IXH100 Dry Vacuum

iXH100

100

0.02

2.1

0.045

63

Edwards  IXH610 Dry Vacuum Pump

iXH610

665

0.005

2.6

0.045

64

Edwards  IXH 1210 Dry Vacuum Pump

iXH1210

1025

0.005

3.2

0.045

64

iXH sets new standards for really harsh process capabilities, reliability, and low cost of ownership. iXH pumps offer greatly increased dust and powder handling capabilities.

A wide pump temperature range allows optimisation to minimise by-product accumulation from condensation and plating reactions. iXH is available as primary pump at 100 m³/h (the iXH100) or combined with inverter-driven boosters delivering peak speeds of 665 m³/h (iXH610) or 1025 m³/h (iXH1210).

Product Features

POWDER HANDLING

Greatly increased powder handling capability and innovati ve Gas Buster™ (1) technology

PERFORMANCE

High capacity dry pumps and boosters give an expanded process window to enhance yields

HYDROGEN PUMPING

Greatly increased hydrogen pumping speed for advanced EPI and solar processes

TEMPERATURE CONTROL

Wide temperature range allows optimisation of pump to minimise by-product accumulation from condensation and plating

ENERGY EFFICIENT

Low power consumption plus Green Mode plus no routine maintenance, for low cost of ownership

ZERO MAINTENANCE

Zero maintenance between overhauls and low cost of ownership