The iXL is the most compact and low energy dry pump option. It provides repeatable fast pump down of small load lock chambers and clean process operations with extremely low power consumption.
Hermetically Sealed, innovative mechanism
Superior vacuum levels achieved
Integral controller and safety systems for flexible operation. Low installation costs.
Smooth, low noise and vibration operation
Oil lubricated precision bearings with no routine maintenance
Peak pumping speed
Power at ultimate
Power in Green Mode
Noise at ultimate
The iXL is available as the iXL120N stand-alone unit, or as the iXL1000N combination, which includes an inverter-driven booster delivering 930 m³/h peak pumping speed.
iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. It’s low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!
Class leading chamber pump down time reduces total average cycle time (TACT)
Only 0.55kW* power consuption helps minimise customers cost of ownership
Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance
iXL120 is extremely small and light, saving valuable space
Green Mode can reduce power consumption by up to 92% during idle periods
ZERO PURGE OPTION
Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs