Welcome to the new VACPRO website:

“Optimising your vacuum process”

ixL Dry Pump

The iXL is the most compact and low energy dry pump option. It provides repeatable fast pump down of small load lock chambers and clean process operations with extremely low power consumption.

110 - 930 m³/h

Hermetically Sealed, innovative mechanism

0.013 / 0.001 MBAR

Superior vacuum levels achieved

'Plug and Pump'

Integral controller and safety systems for flexible operation. Low installation costs.

<55DB(A)

Smooth, low noise and vibration operation

No routine maintenance

Oil lubricated precision bearings with no routine maintenance

iXL sizes

Peak pumping speed

Ultimate pressure

Power at ultimate

Power in Green Mode

Noise at ultimate

m³/h

mbar

kW

kW

dB(A)

iXL120

110

0.013

0.55

0.045

<55

iXL1000N

930

0.001

1

0.05

<5

The iXL is available as the iXL120N stand-alone unit, or as the iXL1000N combination, which includes an inverter-driven booster delivering 930 m³/h peak pumping speed.

iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. It’s low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment!

Product Features

UNIQUE PERFORMANCE

Class leading chamber pump down time reduces total average cycle time (TACT)

LOW POWER

Only 0.55kW* power consuption helps minimise customers cost of ownership

SMOOTH RUNNING

Oil lubricated precision bearings ensure smooth, low vibration operation with no routine maintenance

COMPACT

iXL120 is extremely small and light, saving valuable space

GREEN MODE

Green Mode can reduce power consumption by up to 92% during idle periods

ZERO PURGE OPTION

Zero nitrogen purge option eliminates the need for a nitrogen supply, saving installation and operating costs

Documentation