Welcome to the new VACPRO website:

“Optimising your vacuum process”

Mass Flow Controllers & Meters

Accurate, reliable gas flow delivery and control is crucial to many of today’s advanced processes. The MKS family of flow delivery products includes mass flow controllers (MFC), in-situ mass flow verifiers, and flow ratio controllers which accurately and repeatedly divide gas flows into precise flow streams to multiple points in the process. MFCs are available in thermal and pressure based sensor technologies, analog and digital communication, and metal or elastomer seals. Enabling our customers to bring their products and processes to market faster, more reliably, and more cost effectively is at the heart of our flow measurement and control product design philosophy.

R&D > Primary Vacuum Pumps

We offer the broadest range of both dry and oil sealed primary pumps which have become the industry standard due to their high reliability, performance capabilities and serviceability.

Peak pumping speed

Ultimate Vacuum

Ultimate vacuum with gas ballast

Water vapour handling capacity

Noise Level

Units

m3/h

mbar

mbar

g/h

dB(A)

nXDS6i

6.2

0.02

0.05

110

52

nXDS10i

11.4

0.007

0.04

145

52

nXDS15i

15.1

0.007

0.04

145

52

nXDS20i

22.0

0.03

0.06

220

52

XDS35i

35

0.01

0.02

240

57

Peak pumping speed

Ultimate Vacuum

Ultimate vacuum with gas ballast

Water vapour handling capacity

Noise Level

Units

m3/h

mbar

mbar

g/h

dB(A)

E2M0.7

0.75

3x10-3

2x10-1

8

43

E2M1.5

1.6

3x10-3

2.5x10-2

16

54

E1M18

17

3x10-3

6.5x10-1

650

57

E2M18

17

1x10-3

1.5x10-2

300

57

E2M28

27.5

1x10-3

1.5x10-2

700

57

RV3

3.3

2.0x10-3

3.0x10-2

220

48

RV5

5.1

2.0x10-3

3.0x10-2

220

48

RV8

8.5

2.0x10-3

3.0x10-2

220

48

RV12

12

2.0x10-3

3.0x10-2

290

48

Peak pumping speed

Ultimate vacuum

Motor power

Weight

Units

m3/h

mbar

W

Kg

XDD1

1.2

<2

80

6.5

D-LAB  10-100

0.6

100

100

5.8

D-LAB  10-8

0.6

8

90

6.9

D-LAB  20-100

1.2

100

130

7.1

D-LAB  20-8

1.2

8

120

9.3

D-LAB  34-100

2

100

180

10.3

D-LAB    34-8

2

8

200

12.6

R&D > Primary Vacuum Pumps

We offer the broadest range of both dry and oil sealed primary pumps which have become the industry standard due to their high reliability, performance capabilities and serviceability.