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MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, vacuum technology, photonics, lasers, optics and motion control. Our primary served markets are manufacturers of capital equipment for thin film including semiconductor devices, process manufacturing, environmental, life sciences and scientific research.
R&D > Primary Vacuum Pumps
We offer the broadest range of both dry and oil sealed primary pumps which have become the industry standard due to their high reliability, performance capabilities and serviceability.
Peak pumping speed
Ultimate Vacuum
Ultimate vacuum with gas ballast
Water vapour handling capacity
Noise Level
Units
m3/h
mbar
mbar
g/h
dB(A)
nXDS6i
6.2
0.02
0.05
110
52
nXDS10i
11.4
0.007
0.04
145
52
nXDS15i
15.1
0.007
0.04
145
52
nXDS20i
22.0
0.03
0.06
220
52
XDS35i
35
0.01
0.02
240
57
Peak pumping speed
Ultimate Vacuum
Ultimate vacuum with gas ballast
Water vapour handling capacity
Noise Level
Units
m3/h
mbar
mbar
g/h
dB(A)
E2M0.7
0.75
3x10-3
2x10-1
8
43
E2M1.5
1.6
3x10-3
2.5x10-2
16
54
E1M18
17
3x10-3
6.5x10-1
650
57
E2M18
17
1x10-3
1.5x10-2
300
57
E2M28
27.5
1x10-3
1.5x10-2
700
57
RV3
3.3
2.0x10-3
3.0x10-2
220
48
RV5
5.1
2.0x10-3
3.0x10-2
220
48
RV8
8.5
2.0x10-3
3.0x10-2
220
48
RV12
12
2.0x10-3
3.0x10-2
290
48
Peak pumping speed
Ultimate vacuum
Motor power
Weight
Units
m3/h
mbar
W
Kg
XDD1
1.2
<2
80
6.5
D-LAB 10-100
0.6
100
100
5.8
D-LAB 10-8
0.6
8
90
6.9
D-LAB 20-100
1.2
100
130
7.1
D-LAB 20-8
1.2
8
120
9.3
D-LAB 34-100
2
100
180
10.3
D-LAB 34-8
2
8
200
12.6
R&D > Primary Vacuum Pumps
We offer the broadest range of both dry and oil sealed primary pumps which have become the industry standard due to their high reliability, performance capabilities and serviceability.
