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“Optimising your vacuum process”

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P-Series

P-Series, High Performance Mass Flow Controllers are designed for the most critical process applications where accuracy, repeatability as well as pressure insensitivity are requirements. Common Features:

  • Multi-range/multi-gas capability; 1% of setpoint accuracy
  • Metal sealed MFC
  • Less than 750 millisecond settling time
  • Single sided power supply: 11 to 25 VDC
  • Analog I/O options; 0 to 5 VDC
  • Digital I/O: Devicenet; RS485
  • Integral display
  • Embedded Modbus
  • Ethernet User Interface

Products

P2A High Performance Metal-sealed Mass Flow Controllers for Very Low Pressure Drop Applications

Download data sheet for more information

Features

  • Full scale flow rates of 2 sccm to 20 sccm with low pressure drop
  • Less than 2 seecond settling time
  • Analog I/O only: 0 to 5 VDC

P4B High Performance Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm

Download data sheet for more information

Features

  • Full scale flow rates from 5 sccm to 50 slm
  • Multi-gas/multi-range with 1% of setpoint accuracy
  • Analog I/O: 0 to 5 VDC
  • Digital I/O: DeviceNet, RS485
  • MFM option

P9B High Performance Pressure-insensitive, Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm

Download data sheet for more information

Features

  • Full scale flow rates from 5 sccm to 50 slm
  • Pressure insensitive MFC with integral pressure sensor
  • Multi-gas/multi-range with 1% of setpoint accuracy
  • Analog I/O: 0 to 5 VDC
  • Digital I/O: DeviceNet, RS485

P250A High Performance, High Flow Mass Flow Controllers for Flow Rates up to 250 slm

Download data sheet for more information

Features

  • Full scale flow rates from 100 slm to 250 slm
  • Multi-gas/multi-range with 1% of setpoint accuracy
  • Analog I/O: 0 to 5 VDC; 4 to 20 mA
  • Digital I/O: DeviceNet, RS485, Profibus