P-Series

P-Series, High Performance Mass Flow Controllers are designed for the most critical process applications where accuracy, repeatability as well as pressure insensitivity are requirements. Common Features:

Multi-range/multi-gas capability; 1% of setpoint accuracy
Metal sealed MFC
Less than 750 millisecond settling time
Single sided power supply: 11 to 25 VDC
Analog I/O options; 0 to 5 VDC
Digital I/O: Devicenet; RS485
Integral display
Embedded Modbus
Ethernet User Interface

Products

P2A High Performance Metal-sealed Mass Flow Controllers for Very Low Pressure Drop Applications

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Features

Full scale flow rates of 2 sccm to 20 sccm with low pressure drop
Less than 2 seecond settling time
Analog I/O only: 0 to 5 VDC

P4B High Performance Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm

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Features

Full scale flow rates from 5 sccm to 50 slm
Multi-gas/multi-range with 1% of setpoint accuracy
Analog I/O: 0 to 5 VDC
Digital I/O: DeviceNet, RS485
MFM option

P9B High Performance Pressure-insensitive, Multi-gas, Multi-range Mass Flow Controllers for Flow Rates up to 50 slm

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Features

Full scale flow rates from 5 sccm to 50 slm
Pressure insensitive MFC with integral pressure sensor
Multi-gas/multi-range with 1% of setpoint accuracy
Analog I/O: 0 to 5 VDC
Digital I/O: DeviceNet, RS485

P250A High Performance, High Flow Mass Flow Controllers for Flow Rates up to 250 slm

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Features

Full scale flow rates from 100 slm to 250 slm
Multi-gas/multi-range with 1% of setpoint accuracy
Analog I/O: 0 to 5 VDC; 4 to 20 mA
Digital I/O: DeviceNet, RS485, Profibus