Welcome to the new VACPRO website:

“Optimising your vacuum process”

RF & DC Power

MKS is a leading manufacturer of high reliability, compact, solid state, mid to extended (VHF) frequency RF power generators, impedance matching networks and plasma metrology, RF amplifiers for MRI equipment, and pulsed DC power generators.

  • DC Power Generators
  • RF Power Generators

DC Power Supplies and DC Power Generators

MKS RPDG generators provide asymmetric bipolar and unipolar pulsed DC power for reactive PVD (Physical Vapor Deposition), CVD (Chemical Vapor Deposition) bias and enhancement coating applications. The RPDG line eliminates yield-limiting factors, thus enabling existing PVD tools to produce the high quality, low-defect films needed for next generation processes.

RPDG-50 5kW Pulsed DC Plasma Generator
Asymmetric bipolar and unipolar DC power in a single unit (3U)
Programmable frequency, and duty cycle.

RPDG-100 10kW Pulsed DC Plasma Generator
Asymmetric bipolar and unipolar DC power in a single unit (3U)
Programmable frequency, and duty cycle.

RPDG-200 20kW Pulsed DC Plasma Generator
Asymmetric bipolar and unipolar DC power
Programmable frequency, and duty cycle.

RF Generator Products with Precise DSP-based Power Control

MKS RF Power Generators provide reliable solid state power for thin films processing equipment. They are vital components of semiconductor fabrication systems, which produce the integrated circuits (ICs) or chips required by modern computers and electronic equipment. MKS RF Generators, combined with our Impedance Matching Network and our V/I Probe form a complete RF Delivery System.

Dynamic Frequency Tuning (DFT) is now available as an option for select MKS RF Plasma Generators. DFT provides near instantaneous impedance tuning and coupled with Advanced Pulsing, accurate power detection with integrated VI Probe provides the most technically advanced product for IC manufacturing.

Products

Visit MKS site for more information of these products.