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REACTIVE GAS

Ozone Gas & Dissolved Ozone Liquid Delivery Generators and Systems
CO2 Carbonated Water Delivery Systems

MKS offers a complete spectrum of ultra clean, highly reliable ozone generation, delivery and accessory products. The ozone product family includes compact, high concentration ozone generators, closed-loop controlled ozone gas delivery subsystems, state-of-the-art, high concentration dissolved ozone liquid delivery subsystems and ozone accessories for flow mixing and ozone destruction.

The DI-SOLVER CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and/or corrosion by creating UPW (ultrapure water) with precisely defined conductivity.

Products

  • Dissolved CO2
  • Ozone

Compact Carbonated Ultrapure Water Delivery System

The DI-SOLVER CO2 is used in single substrate cleaning tools for rinsing steps to prevent ESD effects and/or corrosion by creating UPW (ultrapure water) with precisely defined conductivity. It is a compact system for tool integration, providing conductive DI-CO2 water (carbonated ultra-pure water) with closed loop controlled conductivity. The conductivity is kept at a constant value under changing flow conditions by control of the CO2 concentration in the DI-CO2 water..

Features

  • Closed-loop conductivity control
  • Small, compact module for integration
  • Low cost of ownership, no CO2 and no UPW consumption at process pauses
  • Maximum conductivity at physical limits
  • Highest accuracy
  • Flow is allowed to change between 0.5 - 90 L/min to keep conductivity stable (up to ± 3%)
  • Maintenance-free contactor

applications

  • Several process steps in the semiconductor industry require de-ionized (DI) water with precisely defined conductivity. The DI-SOLVER CO2 meets this demand.

Download data sheet for more information

MKS offers a complete spectrum of ultra clean, highly reliable ozone generation, delivery and accessory products. The ozone product family includes compact, high concentration ozone generators, closed-loop controlled ozone gas delivery subsystems, state-of-the-art, high concentration dissolved ozone liquid delivery subsystems and ozone accessories for flow mixing and ozone destruction.

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Visit MKS site for more information of these products.