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Semiconductor - Dry Pumps

Edwards has the largest installed base of dry vacuum pumps in the world. Dry mechanism vacuum pumps offer many key advantages for industrial applications. Edwards' intelligent and compact dry pumps (nXLi - the latest addition, ideal for Scientific OEMs, LCMS and ICPMS users; iXL - for clean applications; GX - for medium applications; and iXH - for harsh applications) will save energy, reduce installation costs, and enhance process control and optimisation.

iXL

110-930 m³/h

0.001 mbar

GX

90-1000 m³/h

0.005 mbar

iXH

100-1025 m³/h

0.005 mbar

iGX

105-800 m³/h

0.0007 mbar

Peak pumping speed

Ultimate Vacuum

Ultimate vacuum with gas ballast

Water vapour handling capacity

Noise Leve

Units

m3/h

mbar

mbar

g/h

dB(A)

nXDS6i

6.2

0.02

0.05

110

52

nXDS10i

11.4

0.007

0.04

145

52

nXDS15i

15.1

0.007

0.04

145

52

nXDS20i

22.0

0.03

0.06

220

52

XDS35i

35

0.01

0.02

240

57

R&D > Primary Vacuum Pumps > Large Dry

Edwards has the largest installed base of dry vacuum pumps in the world. Dry mechanism vacuum pumps offer many key advantages for industrial applications. Edwards GV80 Drystar is robust, highly reliable and the most cost-effective introduction to basic dry pumping. Edwards' intelligent and compact dry pumps (iXL - for clean applications; GX - for medium applications; and iXH - for harsh applications) will save energy, reduce installation costs, and enhance process control and optimisation.

80-390 m3/h

0.003 mbar

GX

90-1000 m3/h

0.005 mbar

iXL

110-930 m3/h

0.001 mbar

iXH

100-1025 m3/h

0.005 mbar