Welcome to the new VACPRO website:

“Optimising your vacuum process”

Spectra Series

The Spectra series is a cost effective, reliable, high performance exhaust treatment solution for the latest generation Flat Panel Display (FPD), Photovoltaic & LED markets.

Spectra G - Clean Abatement for GaN Processes


Spectra Z - Unique 4-Stage Combustion Technology Suited to Handle High Volumes of Pyrophoric Materials

spectra g

The Spectra-G is a cost-effective, high performance exhaust treatment solution for nitride MOCVD manufacturing.

Technology

4 Stage Combustion 
The unique 4-stage combustion system of the Spectra-G ensures that oxidation of silane occurs in the middle of the combustion zone, away from the inlets, hence preventing the deposition of oxide powders on the combustor nozzles and maximizing uptime.
 
Effective Powder Handling System 
The oxide powders generated by the combustion of metalorganics are entrapped in the cooling air stream that is introduced in the Spectra-G at a velocity of 10 m/sec.
 
Air flow is generated by the house extraction system. This air-cooled design ensures that combustion by-products are efficiently transported from the Spectra-G to the factory central scrubber or dust filter.
 
Optimum Combustion 
Nitride MOCVD processes involve the use of high H2 and NH3 flows. The Spectra-G utilizes the inherent flammability of these gases to minimize the additional fuel required to complete the gas abatement reactions (oxidation). Different fuel types are available to suit customer requirements.
 
The high gas capacity of the Spectra-G allows up to six production MOCVD tools to be connected. Each individual inlet allows each exhaust to act independently, thereby reducing capital and running costs.

spectra Z

The Spectra-Z system is a cost effective, reliable, high performance exhaust treatment solution for the latest generation Flat Panel Display (FPD) and Solar Cell manufacturing processes.

4 Stage Combustion 
 
The unique 4-stage combustion system of the Spectra-Z ensures that oxidation of silane occurs in the middle of the combustion zone, away from the inlets, hence preventing the deposition of silica powders on the combustor nozzles.
 
Effective Powder Handling System 
The powders generated by the combustion of SiH4 and PH3 are entrapped in the cooling air stream that is introduced in the Spectra-Z at a velocity of 10 m/sec. Air flow is generated by the house extraction system. This air-cooled design ensures that combustion by-products are efficiently transported from the Spectra-Z to the factory central scrubber or dust filter.
 
By-Product Destruction 
In the Flat Panel CVD 8 solar cell process hydride gases SiH4, PH3, NH3) flow through the process chamber. The Spectra-Z abates these gases and related by products in a cost efficient manner by operating at an optimized fuel rate.
For 'clean' gas abatement, please contact your Edwards Exhaust Management Specialist.

User Friendly System

Ease of use - The Spectra is configured, monitored and controlled via a large touch-screen display. Fourgauges display the fuel gas and extraction pressures.

Component Accessibility - Designed for fast maintenance - all electrical components are accessible from the front of the Spectra and all mechanical components are easily accessible from the left side of the system.

Easy communication - The PLC and built-in computer of the Spectra allow easy communication with the vacuum pumps, the process tool and the factory monitoring system.

Features and Benefits

  • High Abatement Performance
  • Capable of treating all exhaust gases from multiple MOCVD production tools
  • Proven Superior Reliability
  • Risk Management
  • Combustion of all flammable gases
  • Air-cooled design as standard
  • Low Cost of Ownership
  • Minimum fuel gas consumption for full process gas abatement
  • Up to six process inlets
  • No water or oxygen requirement
  • Low power consumption
  • Low nitrogen consumption