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Vapor Delivery Controllers

The 1150 Series products provide controlled amounts of vapor from a low vapor pressure liquid source precursor to the process chamber at rates consistent with high throughput requirements. Suitable for advanced CVD precursors, the 1150 Series does not require carrier gas to deliver the precursor vapors, lowering costs of ownership and reducing system complexity. The 1150C consists of a fixed flow element and one capacitance manometer using
viscous flow through a choked orifice. The 1152C contains two capacitance manometers using viscous flow through a laminar flow tube.

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Products

1150C Heated Pressure-Based Mass Flow Controller

Sonic Flow for High Temperature Operation up to 150 degrees C

The 1150C Heated Pressure-Based Mass Flow Controller using viscous flow through a choked orifice is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.

The 1150C consists of a fixed flow element and one capacitance manometer for flow measurement, with a proportioning solenoid control valve for flow control (U.S. Patent No. 4,679,585). The 1150C is contained within a compact temperature-controlled assembly with a temperature status LED and relay to indicate when temperature is in range.

The 1150C Heated Pressure-Based Mass Flow Controller using viscous flow through a choked orifice is capable of delivering vaporized liquid source materials such as: TEOS, DADBS, HMDS, TMCTS, TEAL, TEB, TEG, TEI, TMAL, TMB, TMG, TMI, TaCl5, DMEAA, Ti[OCH(CH3)2]4, TiCl4, TIBAL, and TMP.

1152C Heated Pressure-Based Mass Flow Controller

Laminar Flowfor High Temperature Operation up to 150 degrees C

The MKS Instruments 1152C Vapor Source MFC is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.

The 1152C consists of a fixed flow element and two capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control (U.S. Patent No. 4,679,585). The 1152C contained within a compact temperature-controlled assembly with a temperature status LED and relay to indicate when temperature is in range.

The 1152C Heated Pressure-Based Mass Flow Controller using viscous flow through a laminar flow tube is capable of delivering vaporized liquid source materials such as: TEOS, DADBS, HMDS, TMCTS, TEAL, TEB, TEG, TEI, TMAL, TMB, TMG, TMI, TaCl5, DMEAA, Ti[OCH(CH3)2]4, TiCl4, TIBAL, and TMP.