Welcome to the new VACPRO website:

“Optimising your vacuum process”

Mass Spectrometry Solutions

Sensitive and Reproducible Gas Process Monitoring & Control

MKS has 30 years of experience developing and delivering state-of-the-art hardware and software products for gas analysis.

Our wide range of powerful, versatile, and proven mass spectrometry-based solutions deliver a new level of understanding and control in vacuum and gas-related applications to customers. For decades, MKS has been a keen innovator and trusted technology partner in:

  • Ultra-high and high vacuum applications
  • Process monitoring in manufacturing environments
  • Atmospheric and analytical applications

By working closely with customers, MKS continues to deliver valuable analytical solutions to address and overcome the toughest challenges in the key markets that are driving today's technology revolution. Focus markets include but are not limited to semiconductor, thin film, flat panel display, solar, aerospace, automotive, vacuum R&D, catalysis, and high energy physics.

R&D > Primary Vacuum Pumps

We offer the broadest range of both dry and oil sealed primary pumps which have become the industry standard due to their high reliability, performance capabilities and serviceability.

Peak pumping speed

Ultimate Vacuum

Ultimate vacuum with gas ballast

Water vapour handling capacity

Noise Level

Units

m3/h

mbar

mbar

g/h

dB(A)

nXDS6i

6.2

0.02

0.05

110

52

nXDS10i

11.4

0.007

0.04

145

52

nXDS15i

15.1

0.007

0.04

145

52

nXDS20i

22.0

0.03

0.06

220

52

XDS35i

35

0.01

0.02

240

57

Peak pumping speed

Ultimate Vacuum

Ultimate vacuum with gas ballast

Water vapour handling capacity

Noise Level

Units

m3/h

mbar

mbar

g/h

dB(A)

E2M0.7

0.75

3x10-3

2x10-1

8

43

E2M1.5

1.6

3x10-3

2.5x10-2

16

54

E1M18

17

3x10-3

6.5x10-1

650

57

E2M18

17

1x10-3

1.5x10-2

300

57

E2M28

27.5

1x10-3

1.5x10-2

700

57

RV3

3.3

2.0x10-3

3.0x10-2

220

48

RV5

5.1

2.0x10-3

3.0x10-2

220

48

RV8

8.5

2.0x10-3

3.0x10-2

220

48

RV12

12

2.0x10-3

3.0x10-2

290

48

Peak pumping speed

Ultimate vacuum

Motor power

Weight

Units

m3/h

mbar

W

Kg

XDD1

1.2

<2

80

6.5

D-LAB  10-100

0.6

100

100

5.8

D-LAB  10-8

0.6

8

90

6.9

D-LAB  20-100

1.2

100

130

7.1

D-LAB  20-8

1.2

8

120

9.3

D-LAB  34-100

2

100

180

10.3

D-LAB    34-8

2

8

200

12.6

R&D > Primary Vacuum Pumps

We offer the broadest range of both dry and oil sealed primary pumps which have become the industry standard due to their high reliability, performance capabilities and serviceability.