Welcome to the new VACPRO website:

“Optimising your vacuum process”

Semiconductor

We offer the broadest range of exhaust management technologies, demonstrated in a series of products and systems designed to meet all customers requirements - from low-cost facility management to full enviromental protection. We are committed to supplying exhaust management systems that match customer specific application requirements.

Peak pumping speed

Ultimate Vacuum

Ultimate vacuum with gas ballast

Water vapour handling capacity

Noise Leve

Units

m3/h

mbar

mbar

g/h

dB(A)

nXDS6i

6.2

0.02

0.05

110

52

nXDS10i

11.4

0.007

0.04

145

52

nXDS15i

15.1

0.007

0.04

145

52

nXDS20i

22.0

0.03

0.06

220

52

XDS35i

35

0.01

0.02

240

57

R&D > Primary Vacuum Pumps > Dry Scroll

Scroll pumps are an excellent alternative to rotary vane pumps where oil free pumping is desirable. They use an innovative bearing shield to isolate the vacuum environment from all forms of lubricant not only making them totally dry, but also protecting the bearing from any process gases. Vapour handling is enabled by a gas ballast; this allows the range of pumps to satisfy many applications that were previously off limits to scroll pumps.

6-22 m3/h

0.007 mbar

35-46 m3/h

0.01 mbar

R&D > Primary Vacuum Pumps > Dry Scroll

Scroll pumps are an excellent alternative to rotary vane pumps where oil free pumping is desirable. They use an innovative bearing shield to isolate the vacuum environment from all forms of lubricant not only making them totally dry, but also protecting the bearing from any process gases. Vapour handling is enabled by a gas ballast; this allows the range of pumps to satisfy many applications that were previously off limits to scroll pumps.

6-22 m3/h

0.007 mbar

35-46 m3/h

0.01 mbar