HPQ3 & HPQ3S

Name: HPQ3 & HPQ3S
Brand: VACPRO - Vacuum Process Solutions
Availability: OutOfStock

HPQ3

HPQ3 High Pressure RGA (<1 mTorr)

High pressure compact quadrupole process monitors without differential pumping.

HPQ3 allows operation far beyond the 1e-4 mbar total pressure limit of other residual gas analyzers without the need for differential pumping. Field-proven technology coupled with the latest innovative electronics platform derived from the Microvision 2 family give data quality not previously seen in this class of instrument. The HPQ3 has a variety of software control options to match the requirements of any application.

HPQ3 can be used for processes where data is required up to a total pressure of 1.3⁻³mbar.

HPQ3S

HPQ3S High Pressure RGA(<8mTorr)

High pressure compact quadrupole process monitors without differential pumping.

HPQ3S allows operation far beyond the 1e-4 mbar total pressure limit of other residual gas analyzers without the need for differential pumping. Field-proven technology coupled with the latest innovative electronics platform derived from the Microvision 2 family give data quality not previously seen in this class of instrument. The HPQ3S has a variety of software control options to match the requirements of any application.

For specific higher pressure applications up to 1⁻²mbar the HPQ3S makes real-time corrections using a gauge pressure from the tool or by using a variety of optional independent gauges fitted to a custom F-Chamber designed for optimum performance.

View full details

Features & Benefits:

Easily installed
Web interface for setup and control on any network
High reliability & low cost

Applications

The HPQ3 and HPQ3S are suitable for a wide range of applications in PVD or for vacuum systems with inert residual gases including:

Leak detection
Vacuum diagnostics
Pump down monitoring
Process monitoring
Rate-of rise testing

Download data sheet for more information

1 6

Product Features

Dimensions

Performance Curve

Sustainability

From renewable energy, standard recycling programme for all our pumps, to favouring energy efficient products, we strive to reduce our environmental footprint as a company as well as our products and services

Vaccum Pump Selection Guide
Find Pump

Do you have any questions?
Free Inquiry

You can give us a call back
Request a Call

Trusted By Industry Leaders

Trusted by leading organisations across R&D, semiconductor, pharmaceutical, and industrial sectors, we deliver reliable vacuum solutions backed by decades of technical expertise.