
IE50A
IE50A Multi-gas, Multi-range Elastomer-sealed Mass Flow Controllers for Industrial Environments
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Features
- Flow Rates up to 50 slm
- Seal and valve plug options of Viton, Buna, Neoprene or Kalrez (gas dependent)
- Less than 750 millisecond settling time
- Standard closed conductance leak rate of less than 0.1% of Full Scale
IM50A
IM50A Multi-gas, Multi-range Metal-sealed Mass Flow Controllers for Industrial Environments
Download data sheet for more information
Features
- Flow Rates up to 50 slm
- Metal sealed MFC with Teflon valve plug; MFM is all metal
- Less than 750 millisecond settling time
- Standard closed conductance leak rate of less than 1.0% of Full Scale
IM100A
IM100A Multi-gas, Multi-range Metal-sealed Mass Flow Controllers for Industrial Environments
Download data sheet for more information
Features
- Flow Rates up to 100 slm
- Metal-sealed MFC with Teflon valve plug; MFM is all metal
- Less than 750 millisecond settling time
IE250A
IE250A Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Industrial Environments
Download data sheet for more information
Features
- Flow Rates from 100 to 250 slm
- Seal and valve plug options of Viton, Buna, Neoprene or Kalrez (gas dependent)
- 1 to 2 second settling time
- Standard closed conductance leak rate of less than 1.0% of Full Scale
IM250A
IM250A Multi-gas, Multi-Range, Metal-sealed Mass Flow Controllers for Industrial Environments
Download data sheet for more information
Features
- Full scale flow rates from 100 slm to 250 slm
- 2 to 3 second settling time
- Standard closed conductance leak rate of less than 1% of Full Scale
IE500A
IE500A Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Industrial Environments
Download data sheet for more information
Features
- Flow Rates from 250 to 500 slm
- Seal and valve plug option of Viton, Buna, Neoprene or EPDM (gas dependent)
- 1 to 2 second settling time
- Standard closed conductance leak rate of less than 1.0% of Full Scale
IE1000A
IE1000A Multi-gas, Multi-range Elastomer-sealed Mass Flow Controller for Industrial Environments
Download data sheet for more information
Features
- Flow Rates from 500 to 1000 slm
- Seal and valve plug option of Viton, Buna, Neoprene or EPDM (gas dependent)
- 1 to 2 second settling time
- Standard closed conductance leak rate of less than 1.0% of Full Scale
Dimensions
Performance Curve
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