MF1 General Purpose Mass Flow Controller

Name: MF1 General Purpose Mass Flow Controller
Brand: VACPRO - Vacuum Process Solutions
Availability: OutOfStock

The MF1 is a general purpose mass flow controller (MFC) for flow rates up to 50 slm, with an all-metal sensor. It has multiple features and broad flexibility making it ideal for a wide range of applications and is available in a number of process interfaces (Analog, EtherCAT, Profibus-DP, Modbus/RS485, USB, etc.) for easy and simple compatibility with a wide range of control equipment. The USB interface allows configuration, diagnostics, and even a communication link for non-industrial (laboratory) use.

The small 2.8 x 1 inch (77 x 25 mm) footprint enables compact gas supply systems with improved performance compared to existing mass flow controllers. The MF1 MFC employs the latest design in thermal sensors for mass flow measurement, with fast acting proportioning valve and control circuitry for fast settling time. The control valve is normally closed. Mass Flow Meter (MFM) versions of the MF1 are also available.

View full details

Features

Full Scale flow ranges from 10 sccm to 50 slm for precise and repeatable flow measurement & control across a wide range of applications
Many process interfaces available for easy compatibility with tool controllers
USB interface eases configuration and diagnostics
Available +24 VDC and ±15 VDC supply voltages for compatibility
Multigas & multi-range for 16 gasses reduces MFC inventories
Minimal use of elastomer seals for use in demanding processes
Configurations compatible with earlier MKS MFCs, power supplies, & readout modules

Applications

The MF1 Mass Flow Controller is designed to be particularly effective in a wide range of analytical, environmental, PVD, and coating applications.

Download data sheet for more information

1 6

Product Features

Dimensions

Performance Curve

Sustainability

From renewable energy, standard recycling programme for all our pumps, to favouring energy efficient products, we strive to reduce our environmental footprint as a company as well as our products and services

Vaccum Pump Selection Guide
Find Pump

Do you have any questions?
Free Inquiry

You can give us a call back
Request a Call

Trusted By Industry Leaders

Trusted by leading organisations across R&D, semiconductor, pharmaceutical, and industrial sectors, we deliver reliable vacuum solutions backed by decades of technical expertise.