
Edwards STP Sizes
Integrated Controller
The integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools.
Edwards STP Sizes |
![]() iX455 |
![]() iXR1606 |
![]() iXR1606 |
![]() iXR2206 |
![]() iXR2206 |
![]() iXA2206A |
![]() iXA3306C |
![]() iXA3306C |
![]() iXA4506C |
|
|---|---|---|---|---|---|---|---|---|---|---|
| Inlet flange | ISO | 100K/160K | 160F | 200F/250F | 200F | 250F | 250F | 250F | 320F | 320F |
| Inlet flange | ICF | - | 203 | 253/305 | 253 | 305 | 305 | 305 | 356 | - |
| Pumping speed N₂ | l/s | 300/450 | 1000 | 1600 | 1850 | 2200 | 2200 | 2650 | 3200 | 4000 |
| Pumping speed H₂ | l/s | 300/460 | 800 | 1200 | 1250 | 1350 | 1700 | 2050 | 2300 | 2700 |
| Pumping speed Ar | l/s | - | - | - | 1650 | 2000 | 1900 | 2300 | 2800 | 3400 |
| Compression ratio | N₂ | >10⁸ | >10⁸ | >10⁸ | >10⁸ | >10⁸ | >10⁸ | >10⁸ | >10⁸ | >10⁸ |
| Compression ratio | H₂ | >1x10⁴ | >1x10⁴ | >1x10³ | >1x10³ | >1x10³ | 1.0x10⁴ | 2x10³ | 2x10³ | 1x10³ |
| Ultimate pressure | Pa | 6.5x10⁻⁶ | 6.5x10⁻⁶ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ | 10⁻⁷ |
| *VG flanges also available. ** extreme low vibration available | ||||||||||
Ultra High Vacuum
The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beamlines on CD SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios.
Edwards STP Sizes
|
![]() STP301 |
![]() STP451 |
![]() STP603 |
![]() STP1003 |
|
|---|---|---|---|---|---|
| Inlet flange | ISO100 / ICF152 | ISO160 / ICF203 | ISO160 | ISO200 | |
| Pumping speed N₂ | l/s | 300 | 480 | 650 | 1000 |
| Pumping speed H₂ | l/s | 300 | 460 | 550 | 800 |
| Compression ratio N₂ / He / H₂ | >10⁸ / 5x10⁵ / 2x10⁴ | >10⁸ / 5x10⁵ / 2x10⁴ | >10⁸ / - / >10⁵ | >10⁸ / - / >10⁵ | |
| Ultimate pressure with bake out heating ISO flange ICF flange |
Pa | 6.5x10⁻⁶ / - | 6.5x10⁻⁶ / 10⁻⁸ | 6.5x10⁻⁶ / - | 10⁻⁶ / - |
Documentation
Dimensions
Performance Curve
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