Upstream Pressure Control

Name: Upstream Pressure Control
Brand: VACPRO - Vacuum Process Solutions
Availability: OutOfStock

Upstream Valves and Pressure Controllers

MKS provides multiple solutions for upstream pressure control. Products include integrated controllers that include Baratron® pressure measurement, standalone solenoid valves, and remote controllers and drivers for solenoid valves. Upstream Pressure controllers are used upstream of the vacuum chamber to control the gas flow entering the vacuum chamber.

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Products

Integrated Upstream Pressure Valves & Controllers
PPCA Pressure Controller
GPCA General Purpose Pressure Controller
640B Absolute Pressure Controller for Closed-Loop Electronic Pressure Control
PPCMA Pressure Controller with Mass Flow Meter
GPCMA General Purpose Pressure Controller with Mass Flow Meter
641B Gage Pressure Controller for Closed-Loop Electronic Pressure Control
piPC PC90 Integrated Pressure Controller
piPC PC99 Integrated Pressure Controller with Mass Flow Meter
Dual-Zone Pressure Controller (DPC)
649B Compact Pressure Controller with Integral Baratron® Capacitance Manometer & Mass Flow Meter

Upstream Valves

148J All-metal Control Valve
154A High Flow Control Valve
248A Flow Control Valve
245 Metal-seated Control Valve

Upstream Valve Controllers

651C Digital/Analog Pressure Controller
1651C Displayless Digital Pressure Controller
244E Pressure/Flow Controller
1249A Solenoid Control Valve Driver
250E Gas Inlet Pressure/Flow Control Module

Visit MKS site for more information of these products.

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